| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a shear force detection element capable of measuring a shear force by a simple constitution, a tactile sensor, and a gripping device. <P>SOLUTION: The shear force detection element 200 includes a rectangular shear force detecting aperture 111, a sensor substrate 11 having a frame provided at an outer periphery of the shear force detecting aperture 111, a support film 14 formed on the sensor substrate 11 and having flexibility to seal the shear force detecting aperture 111, a shear force detecting piezoelectric body 210 which is provided on the support film 14 along a long side of the shear force detecting aperture 111 and extends astride the inside and outside of the shear force detecting aperture 111 when viewing the sensor in a plane and outputs an electric signal upon being bent, and an elastic film 15 covering the shear force detecting piezoelectric body 210 and the support film 14. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
