| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of preparing a coating liquid for element isolation material, which hardly generates peeling between a substrate and an element isolation layer or cracks thereof, and which forms a flat element isolation layer on a substrate having a concave groove. SOLUTION: In the method of preparing the coating liquid for element isolation material a mixed liquid is prepared which includes a first alkoxysilane compound represented by Si(OR<SP>1</SP>)<SB>4</SB>(wherein, R<SP>1</SP>is an organic group of 2-6C), a second alkoxysilane compound represented by R<SP>2</SP><SB>n</SB>Si(OR<SP>3</SP>)<SB>4-n</SB>(wherein, R<SP>2</SP>is methyl, ethyl, propyl, vinyl or phenyl, and R<SP>3</SP>is an organic group of 2-6C and n is an integer of 1-3), and a first solvent. The first and second alkoxysilane compounds are mixed so that a mol ratio of the second alkoxysilane compound to the whole alkoxysilane compounds is 0.09-0.9. This mixed liquid is hydrolyzed and condensed to prepare the insulating film forming precursor, and the second solvent is added thereto to prepare the coating liquid. COPYRIGHT: (C)2011,JPO&INPIT |
