| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holder capable of easily and surely unlocking the lock of a substrate without damaging the substrate or the substrate holder. SOLUTION: The substrate holder includes an engagement part 2 for attaching the substrate holder to a chassis S, and a substrate lock part 3 for being locked to an edge Be of a holding object substrate B to hold the substrate B. The substrate lock part 3 includes: a lock piece 33 having a hook 33c locked to the edge Be in the state where the substrate B is held; and a jumping-up piece 34 formed integrally with the lock piece 33, wherein a tip part 34a thereof can elastically contact the undersurface of the substrate B toward the upper side. The lock piece 33 is formed as a tapered surface 33b of which the surface on the side facing the edge Be of the substrate B is tilted toward the upper side, and the jumping-up piece 34 is structured such that a tip part 34a is displaced upward when the lock piece 33 is elastically deformed in the direction for unlocking the lock to the substrate B. COPYRIGHT: (C)2011,JPO&INPIT |
