| 摘要 |
PROBLEM TO BE SOLVED: To prevent cracks of an observation window part due to thermal expansion by high temperature inside of a furnace, in a device for observing inside of a furnace. SOLUTION: The device 21 for observing inside of the furnace includes a casing 42 inserted into the furnace and an imaging device 8 arranged within the casing 42. The imaging device 8 observes inside the furnace through the window part 5 provided on the wall face of the casing 42. A cooling gas supply device 50 supplying cooling gas into the casing 42 is provided. The casing 42 includes window support parts 42c supporting the periphery of the window part 5. Cooling gas vent holes 53 are formed by one or both of the window support parts 42c and the window part 5, and cooling gas is made to flow out of the casing 42 inside the furnace through the cooling gas vent holes 53. The cooling gas vent hole 53 is positioned near the outer peripheral face of the window part 5. This configuration makes the cooling gas pass through both of at least part of the outer peripheral face of the window part 5 and the cooling gas vent holes 53 and thus, and flow out inside 44a of the furnace. COPYRIGHT: (C)2011,JPO&INPIT
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