| 摘要 |
Disclosed is a vacuum transfer apparatus, which can increase a transfer amount in a vertical direction of a transferred object and can reduce a volume required for placement of the vacuum transfer apparatus, whereby contributing to the size reduction of the vacuum transfer apparatus. The vacuum transfer apparatus includes a horizontal transfer mechanism 111 for transferring a substrate 100 in a horizontal direction, a vertical transfer mechanism 112 for transferring the substrate 100 in a vertical direction, a vacuum vessel 101 including the horizontal transfer mechanism 111 and the vertical transfer mechanism 112, a horizontal driving part 113 having X and Y axis direction driving shafts 107a and 107b disposed in the vacuum vessel 101 and driving the horizontal transfer mechanism 111 by means of the X and Y axis direction driving shafts 107a and 107b, and a vertical driving part 114 having Z axis direction driving shafts 108a and 108b disposed in the vacuum vessel 101 and driving the vertical transfer mechanism 112 by means of the Z axis direction driving shafts 108a and 108b.
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