METHOD AND DEVICE FOR PRODUCING SHORT-CHAINED HALOGENATED POLYSILANES

摘要

The invention relates to a method and a device for producing short-chained halogenated polysilanes and/or short-chained halogenated polysilanes and halogenide-containing silicon by thermolytic decomposition of long-chained halogenated polysilanes. The thermolytic decomposition of long-chained halogenated polysilanes diluted with low-molecular halogen silanes is carried out under an atmosphere of halogen silanes, thereby ensuring the production of such products at industrial scale in a simple and cost-effective manner.