MEMS RESONATOR HAVING A TRANSISTOR AND OSCILLATOR COMPRISING SUCH A RESONATOR

摘要

The invention relates to a MEMS resonator having a transistor which includes: a casing in which the body of the transistor is formed, which includes a source region (108; 208; 308), a drain region (109; 209; 309), and a semiconductor region forming a channel connecting the source region and the drain region; a vibrating structure (110, 210; 310) rigidly connected to a substrate while at the same time being free to vibrate; and a stationary structure (112; 212; 330) supported by the substrate, a space (or gap) being arranged between the stationary structure and the vibrating structure; the casing being built into either the vibrating structure (210) or the stationary structure (112; 330), such that the channel extends opposite said space, and said space encloses a coupling microstructure (126; 226; 328) comprising a thickness made of a piezoelectric material and provided to ensure electromechanical coupling between the vibrating structure (110; 210; 310) and the channel, such as to enable the conductibility of said transistor body to be modulated to the vibration frequency of the vibrating structure.