Zener-Triggered SCR-Based Electrostatic Discharge Protection Devices For CDM And HBM Stress Conditions

摘要

SCR device is modified to improve turn-on speed for CDM stress conditions. A zener diode is integrated inside SCR device to create an internal feedback and improve turn-on speed. The zener diode is designed as a p+n+ diode in the boundary of the well-substrate junction. In the preferred implementation, zener diode is integrated inside the DSCR and is called zener-triggered DSCR. Zener-triggered DSCR reduces the first breakdown voltage to provide protection for thin gate oxide during HBM stress conditions. At the same time, this device increases turn-on speed to provide protection for CDM stress conditions.