| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam scanning method, along with a charged particle beam device, capable of striking a balance between the suppression of effect of electrostatic charge generated by scanning of a front frame and the suppression of an electrostatic charge phenomenon inherent in a scanning pattern generated when scanning is conducted in the same order. SOLUTION: In the charged particle beam scanning method scanning charged particle beams in the prescribed scanning pattern and the charged particle beam device, in accordance with a replacement of a frame, a scanning starting point in the vertical direction of a scanning line is changed by the prescribed amount in the prescribed direction. By the constitution like this, a scanning pattern can be changed every frame while avoiding the position of the final scanning line where electrostatic charges are seemed to be most accumulated by the beam scanning in the preceding frame, thereby forming a charged particle beam image having no partial imbalance of brightness. COPYRIGHT: (C)2011,JPO&INPIT |
