| 摘要 |
PROBLEM TO BE SOLVED: To suppress early devitrification, blackening, etc., in the case of a high input electric power by restricting the distance between an ultraviolet lamp affected by its temperature and a treatment unit. SOLUTION: A pair of discharge electrodes 15a and 15b are oppositely arranged in the axial direction in a luminescent tube 14 made of an ultraviolet-transmitting quartz glass and having an air-tight discharge space 13. An ultraviolet lamp 100 is constituted by filling the discharge space 13 with a lamp filler comprising a rare gas, mercury, a halogen, or a luminescent metal in an amount sufficient to keep the space 13 in a state of an arc discharge, and the lamp filler is allowed to emit ultraviolet light when the lamp is on. The ultraviolet lamp 100 is inserted into the inner tube 21 of an ultraviolet-transmitting double structure treatment unit 200 in which a coolant 24 which cools the ultraviolet lamp 100 is circulated between the inner tube 21 and an outer tube 22. The distance D [mm] between the ultraviolet lamp 100 and the inner tube 21 of the treatment unit 200 and the input electric power P [W/cm] of the ultraviolet lamp 100 satisfy D≤-0.2P+35, and an ultraviolet reflective film 25 is formed on the inner surface of the outer tube 22. COPYRIGHT: (C)2011,JPO&INPIT
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