| 发明名称 |
PLASMA EXHAUST GAS CIRCULATION SYSTEM |
| 摘要 |
PURPOSE: A plasma exhaust gas circulation system is provided to reduce resource costs by recycling a part of gas used in a plasma generating device. CONSTITUTION: A plasma generating device(120) is arranged in a chamber(110). A gas supply tube(130) supplies gas to the plasma generating device. A gas suction tube(140) is connected to one side of the plasma generating device. A pump(150) is connected to the other side of the gas suction tube. A gas vent(170) discharges the inner gas of the chamber to the outside.
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| 申请公布号 |
KR20110060994(A) |
申请公布日期 |
2011.06.09 |
| 申请号 |
KR20090117495 |
申请日期 |
2009.12.01 |
| 申请人 |
BI EMT CO., LTD. |
发明人 |
PARK, JONG IN;YANG, CHANG SIL;YANG, DOO HOON;KO, MIN GUK |
| 分类号 |
H01L21/02;H01L21/205;H01L21/3065 |
主分类号 |
H01L21/02 |
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