发明名称 SETTING OF ELASTIC SHEET
摘要 <p>PURPOSE:To facilitate the setting of an elastic sheet by a method wherein a wafer ring is put on an expanded sheet and at that state the sheet is cut along the outside circumference of the wafer ring so as to wind itself around the outside brim of the wafer ring. CONSTITUTION:After an outer brim of an elastic sheet 2 on which divided wafers 5 adhere is clamped, a jig 6 placed inside a holding member and a movable ring 7 is ascended to expand the sheet 2. Then an annular wafer ring 11 is put on the sheet and, at that state, the sheet 2 is cut around the outside circumference of the wafer ring 11 by a cutter 14. With the cutting of the sheet, the movable ring 7 is ascended by an elasticity of a compressed coil spring 9 to make the brim of the cut sheet wind itself around the outside brim of the wafer ring 11 and the sheet is fixed to the wafer ring 11 keeping the expanded state by contract action.</p>
申请公布号 JPS59232436(A) 申请公布日期 1984.12.27
申请号 JP19830108421 申请日期 1983.06.15
申请人 ROOMU KK 发明人 KAMIYAMA SUSUMU;SATOU TAKESHI
分类号 H01L21/683;H01L21/00;H01L21/301;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/683
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