| 发明名称 |
SHEAR SENSORS AND USES THEREOF |
| 摘要 |
The present invention relates to shear sensors. In particular, the present invention relates to deformable sensors for measurement of shear forces during chemical mechanical polishing. |
| 申请公布号 |
US2011132871(A1) |
申请公布日期 |
2011.06.09 |
| 申请号 |
US20090935726 |
申请日期 |
2009.04.03 |
| 申请人 |
TUFTS UNIVERSITY |
发明人 |
WHITE ROBERT D.;MUELLER ANDREW;ROGERS CHRISTOPHER;MANNO VINCENT;STONE HOWARD;GAUTHIER DOUGLAS A. |
| 分类号 |
C23F4/04;C23F1/08 |
主分类号 |
C23F4/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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