PIEZORESISTIVE EFFECT MICROPHONE USING NANO WIRE AND METHOD OF MANUFACTURING THEREOF

摘要

PURPOSE: A microphone of piezoresistive type and a manufacturing method thereof are provided to simplify a sensing circuit and a manufacturing process, by removing the necessity of manufacturing a parallel plate electrode structure. CONSTITUTION: A first substrate has a silicon nano wire(21) in the center. A silicon body of the bottom of the nano wire is etched. An electrode layer(22) is formed on the first substrate. The first substrate is divided into two parts. A membrane film(23) is formed on the first substrate, and reveals the electrode layer. An adhesive layer is formed on the membrane film on the divided substrate. A second substrate is attached to the adhesive layer, and is etched to reveal the electrode and the center sensing part externally.