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发明名称
Verfahren zur Herstellung eines Halbleiterbauelementes und Halbleiterbauelement
摘要
申请公布号
DE10262313(B4)
申请公布日期
2011.06.09
申请号
DE2002162313
申请日期
2002.03.20
申请人
HYNIX SEMICONDUCTOR INC.
发明人
LEE, HI DEOK
分类号
H01L21/28;H01L21/336;H01L21/334;H01L21/8238;H01L27/092;H01L29/78
主分类号
H01L21/28
代理机构
代理人
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地址
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