| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a sensor unit which is compact and has high reliability, and to provide a method of easily manufacturing such the sensor unit. <P>SOLUTION: The sensor unit 1 includes a sensor 2 which uses a piezoresistive element, and an active element module 5 joined with the sensor, wherein the sensor 2 includes the piezoresistive element positioned in a movable function region 2A, a sensor body connected electrically to the piezoresistive element and having a plurality of bumps 6 and positioned outside the movable function region 2A, and a protective cover member joined to the sensor body, wherein the active element module 5 includes a plurality of contact electrodes 54, which face the sensors 2 so as to be connected to the bumps 6, and wherein weir members 7 surrounding the movable function region 2A are positioned in a gap 9 formed between the sensors and the contact electrodes 54, and a sealing resin 8 having an elastic modulus of 1 to 10 GPa is present in the gap 9 outside the weir members 7. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
