| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer storage cassette capable of preventing a wafer from falling from the wafer storage cassette in an easy method, and to provide a wafer transfer apparatus capable of easily taking the wafer in and out of the wafer storage cassette. SOLUTION: The wafer storage cassette includes a pair of side plates, storage grooves formed in inner walls of the pair of side plates, and wafer taking-in/out surfaces for taking the wafer in and out which are open surfaces of the pair of side plates. Bottom portions of the pair of side plates has angular portions on the wafer taking-in/out surfaces and round portions does not have corners on a side opposite to the wafer taking-in/out surfaces. COPYRIGHT: (C)2011,JPO&INPIT |
