MEMS MICROPHONE AND METHOD FOR MANUFACTURING SAME

摘要

The present invention relates to a MEMS microphone and to a method for manufacturing same, which enable easy manufacture, shorten manufacturing time, and ensure a high yield rate even when a bulk micromachining technology is used, and which enable a surface mount technology (SMT) to be applied to processes for manufacturing same, such that the MEMS microphone is ultra-slim and thus the mass production of MEMS microphones can be accomplished. For this purpose, the MEMS microphone according to the present invention comprises: a substrate; an acoustic chamber formed at the top of the substrate; a plurality of main supports arranged in the acoustic chamber; an electrode plate formed at the bottom surface of the acoustic chamber; and a vibrating plate supported by the plurality of main supports and arranged on the electrode plate.