DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DEVICE USING THE SAME

摘要

PURPOSE: A deposition device and method for manufacturing organic light emitting element using the same are provided to improve the deposition property and deposition film uniformity by using a vacuum deposition method. CONSTITUTION: A deposition device comprises a base(101), a thermal insulating layer(102), a heating layer(103) and a partition wall(104). The thermal insulating layer is formed on the base. A heating layer is formed on the thermal insulating layer as stripe pattern in order to heat the depositing target material. The partition wall is formed on the thermal insulating layer and performs patterning the space which can arrange the depositing material on the heating layer. The thermal insulating layer comprises one selected from the group consisting of ZrO2, SiO2 and Al2O3. The thermal insulating layer is formed on the surface of which the base faces to the heating layer. The heating layer has a plurality of stripe patterns.