| 摘要 |
PROBLEM TO BE SOLVED: To provide a two-axis orthogonal guide device, three-axis orthogonal guide device, three-axis orthogonal/rotational guide device and table device having the same, suitable to achieve each motion of horizontal movement, lifting-up/down and rotation of a table as a single support unit. SOLUTION: The guide device includes: a pair of first moving bodies 10a, 10b; a first guide mechanism for independently movably guiding the pair of first moving bodies 10a, 10b in a direction of a first one of two axes orthogonal to each other when they are estimated; a second moving body 20; and a second guide mechanism which supports the second moving body 20, converts a relative motion for changing an interval in the first axial direction in the pair of first moving bodies 10a, 10b in such a direction as to approach or separate to a motion in a second axial direction of the two axes in the second moving body 20 and which movably guides the second moving body 20 along the second axial direction. COPYRIGHT: (C)2011,JPO&INPIT
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