发明名称 OVEN CHAMBER FOR MANUFACTURING FLAT PANEL DISPLAY
摘要 <p>PURPOSE: An oven chamber for manufacturing a flat panel display is provided to easily attach or detach a shutter, thereby periodically cleaning and replacing the shutter. CONSTITUTION: A substrate is mounted in a body. A thermal process is performed in the body. A plurality of shutters is installed in inlets and outlets formed on the sides of the body respectively. The shutter includes a shutter frame and a plurality of sub shutters(21,22,23). The sub shutters are installed on the shutter frame. The sub shutters include a second support plate.</p>
申请公布号 KR20110061396(A) 申请公布日期 2011.06.09
申请号 KR20090118023 申请日期 2009.12.01
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, JIN SU;YOON, GI CHEON;MIN, KYUNG SEON;LEE, HYUN JOONG
分类号 H01L21/324;H01L21/027 主分类号 H01L21/324
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