发明名称 |
OVEN CHAMBER FOR MANUFACTURING FLAT PANEL DISPLAY |
摘要 |
<p>PURPOSE: An oven chamber for manufacturing a flat panel display is provided to easily attach or detach a shutter, thereby periodically cleaning and replacing the shutter. CONSTITUTION: A substrate is mounted in a body. A thermal process is performed in the body. A plurality of shutters is installed in inlets and outlets formed on the sides of the body respectively. The shutter includes a shutter frame and a plurality of sub shutters(21,22,23). The sub shutters are installed on the shutter frame. The sub shutters include a second support plate.</p> |
申请公布号 |
KR20110061396(A) |
申请公布日期 |
2011.06.09 |
申请号 |
KR20090118023 |
申请日期 |
2009.12.01 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KIM, JIN SU;YOON, GI CHEON;MIN, KYUNG SEON;LEE, HYUN JOONG |
分类号 |
H01L21/324;H01L21/027 |
主分类号 |
H01L21/324 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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