| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate carrying facility capable of precisely transferring a substrate on a substrate transfer device. SOLUTION: This substrate carrying facility includes a substrate storage vessel 2 having a vessel body 3 having a taking in and out port for taking in and out the substrate and a substrate storage space capable of storing a plurality of substrates while separating the interval in the vertical direction and a placing support member 4 capable of placing and supporting its vessel body 3 and having a fan filter unit for blowing clean air to the substrate storage space while placing and supporting the vessel body 3, a vessel carrying device for carrying the substrate storage vessel 2 to a support base 8 in the form of placing and supporting the placing support member 4 for placing and supporting the vessel body 3 from above to the support base 8, and a position adjusting means 51 for adjusting a position in the horizontal direction of the vessel body 3 to a substrate transfer position for transferring the substrate via the taking in and out port by directly abutting on the vessel body 3 while placing and supporting the substrate storage vessel 2 on the support base 8. COPYRIGHT: (C)2011,JPO&INPIT
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