发明名称 METHOD AND DEVICE TO REDUCE DARK CURRENT IN IMAGE SENSORS
摘要 A method to fabricate an image sensor includes providing a semiconductor substrate having a pixel area and a logic area, forming a light sensing element in the pixel area, and forming a first transistor in the pixel area and a second transistor in the logic area. The step of forming the first transistor in the pixel area and the second transistor in the logic area includes performing a first implant process in the pixel area and the logic area, performing a second implant process in the pixel area and the logic area, and performing a third implant process only in the logic area.
申请公布号 US2011133260(A1) 申请公布日期 2011.06.09
申请号 US20100968047 申请日期 2010.12.14
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 KO CHUN-YAO;CHANG CHUNG-WEI;LIU HAN-CHI;WUU SHOU-GWO
分类号 H01L31/113 主分类号 H01L31/113
代理机构 代理人
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