发明名称 |
Actuator, stage device, and exposure apparatus |
摘要 |
An actuator according to example embodiments may be relatively compact and may be driven with 2 degrees of freedom with less spatial constraints. The actuator may include a base member, a ball screw member including a ball screw coupled to the base member and a ball nut screwed onto the ball screw, a driving member coupled to the ball nut so as to move in conjunction with the ball nut, a first directional displacement member configured to move in a first direction in response to a first movement of the driving member, a wedge member coupled to the driving member so as to be moved in a second direction in response to a second movement of the driving member, a second directional displacement member configured to move in a second direction in conjunction with the wedge member, and a binding member configured to bind the first directional displacement member to at least one of the driving member, the wedge member, and the base member.
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申请公布号 |
US2011134409(A1) |
申请公布日期 |
2011.06.09 |
申请号 |
US20100926473 |
申请日期 |
2010.11.19 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
HONG SANG JOON;PARK SANG HYUN;JANG SANG DON;KIM OUI SERG;KOO JA CHOON;IHN YONG SEOK;JANG JUNG WOONG;KIM YOO CHANG |
分类号 |
G03B27/54;F16H25/22;G05G11/00 |
主分类号 |
G03B27/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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