| 摘要 |
<p>The present invention relates to an MEMS microphone capable of preventing a membrane and a back plate from being contacted by an overvoltage or an external shock and the like, and a manufacturing method thereof. Further, the present invention provides an MEMS microphone and a manufacturing method thereof, comprising: a silicon substrate on which a back chamber is formed; a back plate which is deposited on the silicon substrate, and is formed with a plurality of sound holes; a membrane which is deposited on the silicon substrate in order to form an air gap by being isolated from the back plate; and a contact prevention electrode unit which applies repulsive forces to the membrane and is deposited on the silicon substrate.</p> |
