发明名称 |
SEAL PLATE, SEAL MEMBER USED IN SEAL PLATE, AND METHODS FOR MANUFACTURING SAME |
摘要 |
<p>In a vacuum gate valve, a seal member for sealing a gate opening part is bonded to an outer edge part of a planar seal plate that is disposed in such a manner that the planar seal plate is opposed to a valve seat surface of the gate opening part and comes into contact with the valve seat surface. The seal member includes a vacuum seal part that is located on a side farther from the gate opening part and maintains the sealability of the gate opening part when the gate opening part is closed, and also includes a radical seal part that is located on a side closer to the gate opening part and that prevents the seal member from being affected by a treatment gas in the gate opening part when the gate opening part is closed. The vacuum seal part is made of a rubber elastic body, and the radical seal part is configured by providing a radical resistant body that is provided with an excellent radical resistance on the rubber elastic body.</p> |
申请公布号 |
KR20110061614(A) |
申请公布日期 |
2011.06.09 |
申请号 |
KR20117007994 |
申请日期 |
2009.09.15 |
申请人 |
NIPPON VALQUA INDUSTRIES, LTD. |
发明人 |
HAMADE MASATO;YOSHIDA TSUTOMU;YOSHIDA NOBUHIRO;TSUJI KAZUAKI |
分类号 |
F16K3/02;F16J15/10;F16K51/02 |
主分类号 |
F16K3/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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