| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator preferably usable even in a hostile environment and inside a clean room. SOLUTION: The actuator 1 includes a guide rail 2 formed with an elongated hole 22 for making a space S and the outside communicate with each other as well as having the space S axially extending inside the actuator 1, a slider 3 guided by the guide rail 2 to move on the guide rail 2, a ball screw shaft 4 arranged inside the space S of the guide rail 2, a ball screw nut 5 threadably engaging with the ball screw shaft 4 via a plurality of balls, and a bolt 6 for coupling the slider 3 and the ball screw nut 5 via the elongated hole 22. COPYRIGHT: (C)2011,JPO&INPIT |
