| 摘要 |
PROBLEM TO BE SOLVED: To provide a high frequency resonator using the crystal substrate of an Euler angle to which a chemical wet etching system is applicable. SOLUTION: The lamb wave type acoustic wave element is configured such that at least one interdigital electrode 2 for generating lamb wave type acoustic waves or the electrode 2 and a reflector 3 are arranged on the crystal substrate 1, and the cut surface of the crystal substrate 1 and the propagation direction of the lamb wave type acoustic waves satisfy a predetermined relation in Euler angle display (λ,μ,θ). COPYRIGHT: (C)2011,JPO&INPIT
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