| 摘要 |
PROBLEM TO BE SOLVED: To provide an easily-manufacturable probe capable of measuring accurately an electric characteristic of a measuring object, and to provide a method for manufacturing the probe, and an electric characteristic measuring method using the probe. SOLUTION: This method for manufacturing the probe 1 includes steps for: providing a probe pad 20 on one surface of a first member 12 comprising a planar flexible substrate, and providing wiring 13 for transmitting an electric signal between the probe pad 20 and an external circuit, on the other surface of the first member 12; sticking two second members 10-1, 10-2 each comprising a planar rigid substrate respectively at a clearance 21 having a length of approximately double of the thickness of the second member 10-1 or 10-2, on the surface where the wiring 13 of the first member 12 is provided; and bending the first member 12 on which the two second members 10-1, 10-2 are stuck, inward at the center of the clearance 21, to thereby stick together each of the two second members 10-1, 10-2. COPYRIGHT: (C)2011,JPO&INPIT
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