| 摘要 |
PROBLEM TO BE SOLVED: To obtain an X-ray measurement apparatus which attain improvement in the spatial intensity distribution of the flux, alignment of an energy distribution and radiation doses of flux of the intensities in peripheral sections, with those in the center section and the decrease in measurement errors caused by measurement positions, while restraining occurrence of beam hardening. SOLUTION: The X-ray measurement apparatus where a specimen is irradiated with X-rays emitted from an X-ray source and an X-ray detector detects the transmitted dose of the specimen includes a collimator which slices thin and fan-shaped beam X-rays, emitted conically from the X-ray source to make beam conversion of them into sliced-beam X ray and a flux-shielding plate which is interposed between the collimator and the specimen, transmits or shields a portion of a flux of the sliced-beam X-rays, restrains beam hardening, as well as, adjusts the intensity distribution of the flux. COPYRIGHT: (C)2011,JPO&INPIT
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