| 摘要 |
PROBLEM TO BE SOLVED: To provide an excitation device capable of loading a sample having a heavy weight, and exciting it up to a high frequency domain. SOLUTION: This device is provided with: a table 11 for loading a sample A thereon; air springs 12a, 12b, 12c, 12d capable of supporting the weight of the sample A through the table 11, and moving the table 11 in the vertical direction; and an excitor 13 for exciting the sample A in the vertical direction through the table 11 separately from the air springs 12a, 12b, 12c, 12d. COPYRIGHT: (C)2011,JPO&INPIT |
