发明名称 Phase Change Memory Cell with Filled Sidewall Memory Element and Method for Fabricating the Same
摘要 Memory cells are described along with methods for manufacturing. A memory cell described herein includes a bottom electrode, a top electrode overlying the bottom electrode, a via having a sidewall extending from a bottom electrode to a top electrode, and a memory element electrically coupling the bottom electrode to the top electrode. The memory element has an outer surface contacting a dielectric sidewall spacer that is on the sidewall of the via, and comprises a stem portion on the bottom electrode and a cup portion on the stem portion. A fill material is within an interior defined by an inner surface of the cup portion of the memory element.
申请公布号 US2011133150(A1) 申请公布日期 2011.06.09
申请号 US20100978846 申请日期 2010.12.27
申请人 MACRONIX INTERNATIONAL CO., LTD. 发明人 LUNG HSIANG LAN;CHEN CHIEH FANG
分类号 H01L45/00 主分类号 H01L45/00
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