发明名称 SILICON PURIFICATION METHOD
摘要 A silicon purification method includes: loading a base material that is a starting material made of metallic silicon into a graphite crucible, heating and melting all of the base material which is disposed in an acidic inert gas atmosphere, maintaining the molten base material in the graphite crucible, and thereby oxidatively purifying the base material; loading the oxidatively-purified base material into a water-cooled crucible, gradually solidifying the base material after the base material disposed in a high vacuum atmosphere is fully molten, and thereby removing an unsolidified portion; and fully melting the base material which is disposed in a high vacuum atmosphere and in which the unsolidified portion is removed, and maintaining the base material in the water-cooled crucible.
申请公布号 US2011135559(A1) 申请公布日期 2011.06.09
申请号 US200913058455 申请日期 2009.08.12
申请人 ULVAC, INC. 发明人 OOKUBO YASUO
分类号 C01B33/025 主分类号 C01B33/025
代理机构 代理人
主权项
地址