THIN-FILM PRODUCTION METHOD AND THIN-FILM ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a thin-film production method capable of producing a thin film having a stable quality at a low cost.

SOLUTION: The thin-film production method has a disposing process for disposing a substrate 20 in a raw material solution of a thin film to be formed on the substrate 20 and a first forming process for forming a thin film on a first main face 20a of the substrate 20 by irradiating a first light having a wavelength by which a light absorbing rate of a solvent in the raw material solution becomes a predetermined threshold value or more from a first light source 13 and by irradiating a second light having a wavelength by which a light absorbing rate of the solvent becomes lower than that of the first light by the solvent from a second light source 14.

COPYRIGHT: (C)2011,JPO&INPIT