| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe cleaning member capable of cleaning tip parts of probes arranged at narrow pitch intervals with suppressed abrasion. SOLUTION: This probe cleaning member includes: a substrate 100; a catalyst particle layer 200 provided in the whole domain on the surface of the substrate 100, which is a layer of metal particles of iron (Fe), cobalt (Co) or the like; and a plurality of carbon nanotubes 300 standing in large numbers in a bundle shape on the catalyst particle layer 200, and extending in the perpendicular direction to the substrate 100. COPYRIGHT: (C)2011,JPO&INPIT
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