发明名称 |
POINT-OF-USE SILYLAMINE GENERATION |
摘要 |
The production and delivery of a reaction precursor containing one or more silylamines near a point of use is described. Silylamines may include trisilylamine (TSA) but also disilylamine (DSA) and monosilylamine (MSA). Mixtures involving two or more silylamines can change composition (e.g. proportion of DSA to TSA) over time. Producing silylamines near a point-of-use limits changing composition, reduces handling of unstable gases and reduces cost of silylamine-consuming processes.
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申请公布号 |
US2011136347(A1) |
申请公布日期 |
2011.06.09 |
申请号 |
US20100901979 |
申请日期 |
2010.10.11 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
KOVARSKY NICOLAY Y.;LUBOMIRSKY DMITRY |
分类号 |
H01L21/30;C23C16/30;C23C16/40;C23C16/44 |
主分类号 |
H01L21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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