| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma treatment method and device in a packaging container, surely conducting plasma treatment for a treatment object thoroughly, retaining the effect of plasma treatment even after the plasma treatment for long time, and having excellent cost performance. <P>SOLUTION: This plasma treatment method includes: a gas enclosing packaging process of putting the treatment object 6 in a packaging container 4, and sealing after enclosing plasma gas; and a second plasma treatment process of disposing the packaging container 4 after the end of the gas enclosing packaging process in a middle position between at least one pair of electrodes 1A, 1B disposed at a space in the atmospheric pressure, and then applying voltage between the pair of electrodes 1A, 1B to generate plasma 12 in the packaging container 4. <P>COPYRIGHT: (C)2011,JPO&INPIT |
