| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus capable of preventing a malfunction after restarting when a shut-down is not a normal termination. SOLUTION: The substrate processing apparatus includes a notification means for notifying an operator when the shut-down is not a normal termination after starting the substrate processing apparatus that the shut-down is not a normal termination, after restarting the substrate processing apparatus, and a stopping means for temporarily stopping each section of the substrate processing apparatus until the operator performs a proper procedure after restarting the substrate processing apparatus. COPYRIGHT: (C)2011,JPO&INPIT
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