发明名称 |
YIELD LOSS PREDICTION METHOD AND ASSOCIATED COMPUTER READABLE MEDIUM |
摘要 |
A yield loss prediction method includes: performing a plurality of types of defect inspections upon a plurality of batches of wafers which begin to be processed during different periods to generate defect inspection data, respectively; for a specific batch of wafers different from the plurality of batches of wafers, calculating defect prediction data of at least one type of defect inspection according to the defect inspection data of at least the type of defect inspections; and predicting a yield loss of the specific batch of wafers according to at least the defect prediction data.
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申请公布号 |
US2011137595(A1) |
申请公布日期 |
2011.06.09 |
申请号 |
US20100725451 |
申请日期 |
2010.03.16 |
申请人 |
CHU YIJ-CHIEH;TIAN YUN-ZONG;KAO SHIH-CHANG;CHEN WEI-JUN;CHEN CHENG-HAO |
发明人 |
CHU YIJ-CHIEH;TIAN YUN-ZONG;KAO SHIH-CHANG;CHEN WEI-JUN;CHEN CHENG-HAO |
分类号 |
G06F19/00 |
主分类号 |
G06F19/00 |
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