发明名称 |
METHOD AND APPARATUS FOR ANALYSIS OF CONTINOUS DATA USING BINARY PARSING |
摘要 |
A method, apparatus, and a system for generating a binary mapping of wafer regions using measured value. A first measured value relating to processing a first workpiece is acquired. A second measured value relating to a second workpiece is acquired. At least a first region common to the first and second workpieces is defined. A determination is made as to whether the results associated with the first or second measured value is above a predetermined threshold. A first binary value is assigned to the first region based upon a determination that the results associated the first or second measured value data is above the threshold.
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申请公布号 |
US2011137597(A1) |
申请公布日期 |
2011.06.09 |
申请号 |
US201113016528 |
申请日期 |
2011.01.28 |
申请人 |
MCINTYRE MICHAEL G;RETERSDORF MICHAEL A |
发明人 |
MCINTYRE MICHAEL G.;RETERSDORF MICHAEL A. |
分类号 |
G06F19/00;G01N37/00 |
主分类号 |
G06F19/00 |
代理机构 |
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代理人 |
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地址 |
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