BLOCK COPOLYMER-ASSISTED NANOLITHOGRAPHY

摘要

In accordance with an embodiment of the disclosure, a method for forming sub- micron size nanostructures on a substrate surface includes contacting a substrate with a tip coated with an ink comprising a block copolymer matrix and a nanostructure precursor to form a printed feature comprising the block copolymer matrix and the nanostructure precursor on the substrate, and reducing the nanostructure precursor of the printed feature to form a nanostructure having a diameter (or line width) of less than 1µm.