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发明名称
LITHOGRAPHIC APPARATUS, SPECTRAL PURITY FILTER AND DEVICE MANUFACTURING METHOD.
摘要
申请公布号
NL2006604(A)
申请公布日期
2011.06.09
申请号
NL20112006604
申请日期
2011.04.14
申请人
ASML NETHERLANDS B.V.,
发明人
BANINE, VADIM;BOEIJ, WILHELMUS;DIJSSELDONK, ANTONIUS;LOOPSTRA, ERIK;MOORS, ROEL;SCHOOT, JAN;SWINKELS, GERARDUS;YAKUNIN, ANDREI
分类号
G03F7/20;G21K1/06
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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