DELIVERY MECHANISM, STAGE APPARATUS, CONVEYANCE APPARATUS, EXPOSURE APPARATUS, AND METHOD FOR MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To deliver a substrate without inducing placement deviations or deformations.

SOLUTION: A delivery mechanism 50 delivers and receives a substrate P to a substrate holder 9 provided with a mount 9a, where the substrate P is mounted. The mechanism includes a plurality of vertical moving members 55 that vertically move with respect to the mounting 9a, and at least one support member 51 that is installed on at least two of the vertical movement members 55 and supports the substrate P. The vertical movement member 55 vertically moves in such a manner that a part of the support member 51 in contact with the substrate P protrudes and recedes, with respect to the mount 9a.

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