发明名称 PHOTOELECTRIC CONVERSION DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a photoelectric conversion device capable of enhancing light absorption efficiency and lowering manufacturing costs. <P>SOLUTION: The photoelectric conversion device has a light receiving hole 3 bored in a light receiving surface of a single-crystal silicon substrate 1, the light receiving hole 3 including a bottom portion having two bottom surfaces 81, 82. Then, the light receiving hole 3 has a minimum depth of and an maximum length of an opening of the light receiving hole 3, and tilt angles of the bottom surfaces 81, 82 of the bottom portion thereof set so that light entering the light receiving hole 3 is reflected at least twice in the light receiving hole 3. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011114258(A) 申请公布日期 2011.06.09
申请号 JP20090271230 申请日期 2009.11.30
申请人 SEIKO EPSON CORP 发明人 UMETSU KAZUNARI;YAMAZAKI YUTAKA;FURUSAWA MASAHIRO
分类号 H01L31/04 主分类号 H01L31/04
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