| 摘要 |
PROBLEM TO BE SOLVED: To very precisely simulate an operation of a semiconductor device to perform optimum designing. SOLUTION: In a method for simulating an operation of a semiconductor device, a computer device executes the following procedures: a searching procedure which searches a maximum probability point at which the probability of occurrence of defects becomes maximum, in a space by variation values at the time of production with respect to the design values of a plurality of element models of a circuit cell; an error-computing procedure which computes the differences between the plurality of element models and their actually measured values in the searching process as the model errors; a model readjusting procedure which readjusts the plurality of element models in case that the model errors do not satisfy a prescribed precision; and an yield-estimating procedure which estimates a yield of semiconductor devices on the basis of a result of sampling with the maximum probability point as the center by using the plurality of readjusted element models. Thus, the method achieves the solution of the problem. COPYRIGHT: (C)2011,JPO&INPIT
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