| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro electromechanical system (MEMS) optical scanner which can be made compact at a low cost and in which the coincidence of the direction of unnecessary reflected light and the direction of the reflection light on a mirror surface is suppressed, and to provide a method of manufacturing the MEMS optical scanner. SOLUTION: The MEMS optical scanner is formed by using a silicon-on-insulator (SOI) substrate (semiconductor substrate) 100, and includes: a mirror substrate 1 having an outside frame part 10, a movable part 20 provided with a mirror face 21 and a pair of torsion spring parts 30, 30; a first cover substrate 2 connected to one surface side of a mirror forming substrate 1 formed by using a first glass substrate 200; and a second cover substrate 3 connected to the other surface side of the mirror forming substrate 1. The first cover substrate 2 has, on the outer surface side opposite to the mirror forming substrate 1, a formed part 6 formed of a translucent resin, and the surface of the formed part 6 is a non-parallel face 61 which is not parallel to the face on the mirror forming substrate 1 side of the first cover substrate 2. COPYRIGHT: (C)2011,JPO&INPIT
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