发明名称 |
METHOD OF FORMING WAVEGUIDE FACET AND PHOTONICS DEVICE USING THE METHOD |
摘要 |
Provided are a method of forming a waveguide facet and a photonics device using the method. The method includes forming at least one optical device die including waveguides on a substrate, forming at least one trench in a lower surface of the substrate, and cleaving the substrate to form facets of the waveguides over the trench. The trench is formed along a direction crossing the waveguides under the waveguides.
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申请公布号 |
US2011135265(A1) |
申请公布日期 |
2011.06.09 |
申请号 |
US20100842287 |
申请日期 |
2010.07.23 |
申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
PARK SAHNGGI;KIM KAP-JOONG;KIM GYUNGOCK |
分类号 |
G02B6/10;C23F1/00 |
主分类号 |
G02B6/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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