| 摘要 |
PURPOSE: A liquid knife for supplying processing solutions to a substrate is provided to uniformly supply processing solutions to the substrate by dividing a buffer space of the liquid knife by a plurality of partitions. CONSTITUTION: A substrate(10) is transferred in a first horizontal direction by a plurality of transferring rollers(20). A slit type inlet(130) is arranged between a top panel and a bottom panel. A channel type first buffer space(132) is connected to the inlet. A plurality of partitions(140) are arranged to divide the first buffer space into plural parts. A slit type outlet(138) supplies processing solutions from the first buffer space to the substrate.
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