| 摘要 |
PURPOSE: A substrate baking apparatus is provided to improve bake process quality by reducing or preventing the deformation of hollow rotary shafts due to heat from a heater. CONSTITUTION: A bake chamber(102) provides a substrate baking space. A plurality of hollow rotary shafts(110) are extended in a second horizontal direction vertical to a first horizontal direction. A plurality of rollers(112) transfers a substrate in the first horizontal direction. A driving unit(130) rotates the hollow rotary shafts. A plurality of heaters(140) are arranged between the hollow rotary shafts and heat the substrate.
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