| 摘要 |
The present invention relates to a family of liquid group 4 precursors represented by the formula: (pyr*)M(OR 1 )(OR 2 )(OR 3 ), wherein pyr* is an alkyl substituted pyrrolyl, M is a group 4 metal, and R 1-3 can be same or different and are selected from linear or branched C 1-6 alkyls. It also relates to a family of Group 4 precursors represented by the formula: (pyr*)(Cp)M(OR 1 )(OR 2 ), wherein pyr* is an alkyl substituted pyrrolyl, Cp is cyclopentadienyl or alkyl substituted cyclopentadienyl, and M and R 1-2 are as previously defined. Preferred precursors include: (2,5-di-tert-butylpyrrolyl)(tris(ethoxy)titanium; (2,5-di-tert-amylpyrrolyl)(tris(ethoxy)titanium; (2,5-di-tert-amylpyrrolyl)(tris(iso-propoxy)titanium; and (cyclopentadienyl)(2,5-dimethylpyrrolyl)(bis(ethoxy))titanium.
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